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Mark Reynolds profile picture
Mark Reynolds
5 months ago - Translate

https://www.sts-elionix.com/product/els-f150/

1.5 nm beam diameter and minimum proximity effect at 150 kV

The ELS-F150 is the world’s first 150 kV electron beam lithography system.Wider process margin than 125 kV makes it easier to fabricate advanced nanodevices
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